Production Management

Probe CV

Epitaxial layer doping by mercury probe CV

FTIR

Epitaxial Layer Thickness Detection by FTIR

Semiconductor Wafer Profiling System

Full-wafer auto inspection for surface defects

Full-wafer auto inspection for surface defects


Surface roughness by AFM

Surface roughness detection by AFM

Non-contact Mapping

 Wafer thickness and shape by non-contact mapping